¡¡¡¡ÖйúµÄºÏ×ÊÆóÒµÕýÔÚÖÂÁ¦ÓÚ²»¶ÏÀ©´óÆ䵪»¯î÷ïØ£¨InGaN£©LEDµÄÉú²úÄÜÁ¦¡£½üÈÕ£¬µÂ¹úAIXTRON SE¹«Ë¾ÊÕµ½ÁËÀ´×Ô½ËÕè²Ñï¹âµçÓÐÏÞ¹«Ë¾µÄ¶©µ¥£¬¶©¹ºËĄ̈CRIUS IIÐÍ¡¢¾ß±¸Éú²ú55¡Á2Ó¢´çLEDÍâÑÓƬÄÜÁ¦µÄMOCVDÉ豸£¬¾ÝϤ£¬½ËÕè²Ñï¹âµçÊÇÒ»¼ÒÓĘ́Íå²ÓÔ²¹âµç¹É·ÝÓÐÏÞ¹«Ë¾ºÍ´ó½LEDÒµÕßÁªºÏ³ÉÁ¢µÄ¹«Ë¾¡£¸Ã¹«Ë¾ÕýÔÚÑ°Çó´ÓÆäÏÖÓеÄCRIUSÐÍMOCVDÉ豸ÏòAIXTRONÐÂÒ»´úMOCVDÉ豸µÄƽÎȹý¶É¡£
¡¡¡¡½ËÕè²Ñï¹âµçÓÚ½ñÄêµÚ¶þ¼¾¶È¶©¹ºÁËÕâËĄ̈CRIUS IIÐÍMOCVDÉ豸£¬ÔÚ½ñÄêµÄµÚ¶þ¼¾¶Èµ½µÚËļ¾¶ÈµÄÉ豸½»¸¶ÆÚÖ®ºó£¬AIXTRON½«ÅɳöÒ»Ö§¼¼ÊõÖ§³ÖÍŶӣ¬¸ºÔðÔÚ½ËÕè²Ñï¹âµç×îÏȽøµÄÉú²ú³§·¿ÖУ¬°²×°ºÍµ÷ÊÔCRIUS IIÐÍMOCVDÉ豸¡£Äܹ»ÖƱ¸³ö¸ßÁÁ¶ÈµÄÀ¶¹âLED²úÆ·ÊÇÕû¸öϵͳ°²×°ºÍµ÷ÊÔ×îÖÕÄ¿±ê¡£è²Ñï¹âµçÔøÓÚ2010Äê4Ô¶©¹º¶ą̀Aixtron HB-GaN MOCVDÉ豸£¬²¢¼Æ»®Á½ÄêÄÚʵÏÖÓµÓÐ50̨MOCVDÉ豸¡£